Yield Ramp

Description: Provides a knowhow on improving yield in specific areas including methodology, knowledge, tools-techniques and excursion control Effective use of benchmark data for immediate results

Content:

1. Factor of Yield: highest yielding lot capability, lot-to-lot variation, wafer- to wafer, and within wafer variation

2. Process marginality case studies

3. Data Analysis- good lot/bad lot analysis, spatial patterns to pinpoint equipment

4. Process Integration/Design role in yield variation, interaction and structural requirements

5. Defect monitoring program

6. Equipment, Process- Set up and Daily operation, including Hardware, seasoning, insitu clean

7. Tools and Techniques for Rapid yield ramp

8. Non- Technical Areas for Yield Improvement (teams, meeting, metrics…)